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Mems Design, Fabrication, Characterization, and PackagingFrom SPIE-International Society for Optical Engine
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- Sales Rank: #16617537 in Books
- Published on: 2001-04
- Original language: English
- Number of items: 1
- Dimensions: .97" h x 8.22" w x 10.92" l, 2.30 pounds
- Binding: Paperback
- 442 pages
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