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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 2: Micromachining and Microfabrication (SPIE PRESS Monograph Vol
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Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible light that will be necessary to etch features smaller than 0.13 microns. Volume Two focuses on the process technology and the device applicatio
- Sales Rank: #2696126 in Books
- Brand: Brand: Society of Photo Optical
- Published on: 1997-10-06
- Original language: English
- Number of items: 1
- Dimensions: 10.50" h x 7.50" w x 1.75" l,
- Binding: Paperback
- 692 pages
- Used Book in Good Condition
Most helpful customer reviews
2 of 3 people found the following review helpful.
For people interested in MEMS
By Shyuan-Fang Chen
This is a very useful book in MEMS. The content covers wet and dry etching, focused ion beams, plating, sensors, acuators, micro-optical devices and thin film transistor liquid crystal display.
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